SPIN COAT PROCESSING
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| ELUME, INC. - Wafer Processing Facilities |
ELUME, INC. - Newbury Park, CA - - Semiconductor thin-film "short run" foundry, processeing Silicon, Silicon carbide, Lithium niobate, glass, quartz, P(L)ZT, ceramics, (liquid soluble) sodium chloride 50-200mm. Spincoating (SolGel), SOG <2µ, photoimagable Polyimide to 200µ, SU8 to 250µ, Photoresist to 100µ, TeflonAF, BCB , Silicones. Curing to 500°C. Annealing to 1300°C. Etching KOH, HF, RIE, microblasting. Multilayer patterning <1µ to >1µ.
(805)587-2214, Fax: (000)000-0000, E-mail: Sales@Elume.com
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