THIN FILM METROLOGY
| FISCHER TECHNOLOGY Coating Thickness Instruments |
1-FISCHER TECHNOLOGY, INC. - Windsor, CT - - Designers and manufacturers of coating thickness gauges & instruments, material testing instruments, hardness testing and material analysis instruments - The result of years of industry experience and extensive research. FISCHER provides a large variety of testing & analysis instruments for virtually any type of coating thickness related application, material testing and hardness testing. (800)243-8417, (860)683-0781, FAX: (860)688-8496, E-mail: Info@Fischer-Technology.com TDE membership candidate: 3/29/07GP
AXIC, INC. - Santa Clara, CA - - Our new fully automatic PRECISION 1000-B® production line monitor will characterize the effect of variables on the film deposition process. Once the process is defined it is utilized as a quality control monitor to insure the composition and thickness of the production films in semiconductor, superconductor, magnetic and optical applications.
(408)980-0240, Fax: (408)980-0524, E-mail: brad@axic.com
BYK-GARDNER, USA - Columbia, MD - - Instruments for measuring very thin coatings. Utilizing dual sensors with magnetic-inductive Fe and NFe probe, byko-test MPOR automatically recognizes the substrate and is not influenced by any premagnetized substrates. Results are displayed on 2 illuminated LCD displays. Integrated radio transmitter transfers readings wirelessly to computer with radio receiver.
(800)343-7721, (301)483-6500, Fax: (301)483-6555, E-mail: custserv@bykgardnerusa.com
EASTERN APPLIED RESEARCH, INC. - Lockport, NY - - The new Seiko XRF instrument measures virtually any coating non-destructively. Multilayer applications up to 5 layers, ultra thick gold (200 micro inches) in a multilayer, thin films as low as 20 angstroms, lead-free solder and all constituents. A great production instrument and also a very universal lab analyzer.
(800)792-4477, (716)625-8311, Fax: (716)625-8319, E-mail: sales@easternapplied.com
ECI TECHNOLOGY, INC. - E. Totowa, NJ - - Semiconductor & printed circuit board surface analysis tool for solderability and wirebondability quality control. Providing a convenient, reproducible, and user-friendly method of analysis for determining the surface conditions of your product to evaluate and predict the solderability, wirebondability and adhesion characteristics of printed circuit boards or semiconductor wafers and lead frames. .
(973)890-1114, Fax: (973)890-1118, E-mail: info@ecitechnology.com
FILMETRICS, INC. - San Diego, CA - - Affordable and easy-to-use instruments for measuring film
thickness (30Å to 450µm), index of refraction, and deposition rates. Wavelengths available from 200nm to 1700nm. Configurations available for tabletop, in-situ, and in-line applications. Instruments for the semiconductor market, from robust, ultra-fast patterned wafer measurements to automated thickness mapping of unpatterned wafers.
(858)573-9300, Fax: (858)573-9400, E-mail: info@filmetrics.com
FOOTHILL INSTRUMENTS, LLC - La Canada, CA - - Tabletop metrology tools for measuring Si, GaAs, resist, ... of thickness range 20 µm to 500+ µm (Si) or > 1 mm of resist. Ideal for process control of backthinned Si. Our products are also available in component form to allow easy integration or clustering with other tools. Very compact design enables in-process metrology. (818)952-5600, Fax: (000)573-9400, E-mail: sales@foothill-instruments.com
HORIBA JOBIN YVON, INC. - Edison, NJ - -
Our easy to operate spectroscopic ellipsometer instruments allow the accurate characterization of a range of thin film and surface properties including the layer thickness, optical constants, composition, crystallinity, anisotropy, and uniformity. Thickness determinations ranging from a few angstroms to tens of microns are possible for single layers and complex multilayer stacks.
866-jobinyvon, (732)494-8660, Fax: (732)549-5125, E-mail: fluorescence@jobinyvon.net
KLA-TENCOR CORPORATION - San Jose, CA - - Integrating new films, such as photoresists, anti-reflective coatings, and dielectrics, into the production process requires comprehensive films metrology. KLA-Tencor uses optical and electrical measurement technology to control dielectric film thickness, charge composition, and electrical interface quality, minimizing the risk to device electrical performance and ensuring accelerated yield. (408)875-3000, Fax: (408)875-4144, E-mail: info@kla-tencor.com
LUZCHEM RESEARCH, INC. - Ottawa, ON, Canada - - Luzchem's TFA-11 instrument combines the power of interferometric measurements of dry and wet thin film thickness, with a versatile, cost effective dissolution rate monitor. Multiple measurements are possible in a single wafer; typically 4 in a 3 inch wafer and over 30 in an 8 inch wafer.
(800)397-0977, (613)749-2442, Fax: (613)749-2393, E-mail: sales@luzchem.com
MATRIX METROLOGIES, INC. - Holbrook, NY - - XRF film thickness and material composition measurement - Matrix Metrologies is a supplier of film measurement equipment and services used to determine the thickness and composition of metal depositions commonly employed in the metal finishing and microelectronics industries. Our products are used in production, incoming quality, product development and failure analysis.
(631)472.2400, Fax: (631)472-2424, E-mail: info@matrixmetrologies.com
MAXTEK, INC. - Cypress CA - - Innovative thin film deposition measurement and Quartz Crystal Microbalance (QCM) measurement instruments and accessories, including quartz crystals, thin film deposition monitors and thin film controllers and accessories. Our instruments Provide much more capability than simple Deposition Monitors in the form of additional displays, Real-Time graphs, and programmable inputs and outputs .
(714)828-4200, Fax: (714)828-4443, E-mail: sales@maxtekinc.com
PANalytical, INC. - Natick, MA - - Thin film X-Ray metrology tools ranging from the X'Pert PRO MRD for semiconductor research and development labs, to the PW2830 Wafer Analyzer for pilot and volume production. The PANalytical approach simplifies the hand-over from R&D to pilot, to volume production lines in the silicon, data storage and compound industries.. (800)279-7297, (508)647-1100, Fax: (508)647-1115, E-mail: Amec.Info@PANalytical.com
RIGAKU AMERICAS - The Woodlands, TX - - Rigaku X-ray based measurement tools enable everything from in-FAB process control metrology to research & development for thin film and materials characterization. Our Semiconductor Division specializes in making XRF, XRD and XRR metrology tools to measure critical process parameters like thin film: thickness, composition, roughness, density, porosity, and crystal structure. .
(281)362-2300, FAX: (281)364-3628 , E-mail: info@rigaku.com
SCIENTIFIC COMPUTING INTERNATIONAL - Carlsbad, CA - - Raising thin film metrology performance to a new level. FilmTek™ metrology systems can measure a broad array of single and multi-layer films including metallic, semiconductor, amorphous, crystalline, and dielectric materials on virtually any substrate to determine multiple layer thicknesses (from <1Å to 250 microns), surface roughness, damage, wafer curvature, film stress and more.
(760)634-3822, Fax: (760)634-3826, E-mail: info@sci-soft.com
SEMICONSOFT, INC. - Southborough, MA - - Wide range of optical thin-film metrology instruments from high-precision sophisticated ellipsometry and reflectometry systems (spectroscopic, fast single wavelength and Imaging) for research and production applications to low-budget reflectometers for variety of applications. Providing the most sophisticated and user-friendly data analysis software that supports reflectance, transmittance, ellipsometry and imaging analysis.
(617)388-6832, Fax: (603)710-7717, E-mail: info@semiconsoft.com
TECHNOS INTERNATIONAL, INC. - Tempe, AZ - - World leader in applying analytical x-ray metrology tools and solutions for the semiconductor industry, including the TVD 910, and S-MAT thin film metrology product line. With 20 years experience, Technos has gained valuable expertise in analytical x-ray applications for the semiconductor industry via the strength of our worldwide installed base.. (866)832-4666, (480)775-4100, Fax: (866)832-4666, E-mail: sales@technos-intl.com
THERMO FISHER SCIENTIFIC / Environmental Instruments - Franklin, MA - - Parallel angle resolved XPS systems for ultra-thin film thickness and chemical state mapping with our Theta 300 analyzer for 300 mm wafers. Process and defect engineers now have a quick reference to our capabilities in trace chemical analysis, metrology, microspectroscopy and numerous X-ray techniques for wafer, thin-film and surface analysis. (800)678-3221, (631(866)282-0430, (508)553-6850, Fax: (508)520-1460 info@thermo.com
VEECO METROLOGY, INC. - Tucson, AZ - -
The Wyko NT9300 utilizes Veeco’s ninth-generation optical profiling sensor technology to provide fast, highly accurate 3D surface topography measurements from 0.1 nanometer up to 10 millimeters. The extended, large scan capability makes this system ideal for large-region, stitched, and irregular samples . (520)741-1044, Fax: (520)294-1799 sales@veeco.com
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